Download Photomodulated Optical Reflectance: A Fundamental Study by Janusz Bogdanowicz PDF

By Janusz Bogdanowicz

One of the severe concerns in semiconductor know-how is the proper electric characterization of ultra-shallow junctions. one of the plethora of dimension recommendations, the optical reflectance process built during this paintings is the only idea that doesn't require actual touch, making it compatible for non-invasive in-line metrology. This paintings develops generally all of the primary actual types of the photomodulated optical reflectance strategy and introduces novel ways that reach its applicability from dose tracking in the direction of designated service profile reconstruction. It represents an important leap forward in junction metrology with power for business implementation.

Show description

Read or Download Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon PDF

Similar semiconductors books

Printed Circuits Handbook (McGraw Hill Handbooks)

The World's number one consultant to published Circuit Boards_Now thoroughly up-to-date with the most recent details on Lead-Free production! the easiest reference within the box for over 30 years, the published Circuits guide equips you with definitive insurance of each side of revealed circuit assemblies_from layout tips on how to fabrication strategies.

Power-Switching Converters, Second Edition (Electrical Engineering and Electronics)

After approximately a decade of luck due to its thorough insurance, abundance of difficulties and examples, and useful use of simulation and layout, Power-Switching Converters enters its moment variation with new and up to date fabric, totally new layout case stories, and multiplied figures, equations, and homework difficulties.

Technology of Bottled Water, Second Edition

The bottled waters has develop into a necessary and lively region of the beverage international, in built and constructing international locations world wide. due to the fact e-book of the 1st variation in 1998, the has passed through a striking enlargement, and this has served to underline the necessity for an available resource of technical suggestions.

Extra resources for Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Example text

Clarysse, A. Moussa, B. Parmentier, J. Bogdanowicz, W. Vandervorst, H. Bender, M. Pfeffer, M. F. Nielsen, S. Thorsteinsson, R. Lin, D. Petersen, Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures. J. Vac. Sci. Technol. B 28(1), C1C8–C1C14 (2010) 28. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, Chichester, 2007) 29. M. A. Rosenthal, A. Maznev, A. Kasic, P. Y. Guittet, Measuring deeptrench structures with model-based ir. Solid State Technol.

L. Nicolaides, A. Salnick, J. Opsal, Study of low energy implants for ultrashallow junctions using thermal wave and optical techniques. Rev. Sci. Instrum. 74(1), 563–565 (2003) 40. L. Nicolaides, A. Salnick, J. Opsal, Nondestructive analysis of ultrashallow junctions using thermal wave technology. Rev. Sci. Instrm. 74(1), 586–588 (2003) 41. A. Salnick, J. Opsal, Quantitative photothermal characterization of ion-implanted layers in si. J. Appl. Phys. 91(5), 2874–2882 (2002) References 19 42. G. Smets, E.

1). The boundary conditions of Maxwell’s wave equations indeed show that only a proportion t˜ of the electromagnetic wave is transmitted through the interface. e. a proportion r˜ = t˜ − 1, bounces back or is reflected in opposite direction [1]. In other words, for an incident electric field E˜ i , the transmitted electric field is E˜ t = t˜E˜ i and the reflected electric field is E˜ r = r˜ E˜ i , where t˜ and r˜ are respectively called the transmission and reflection coefficients. e. n˜ 1 − n˜ 2 .

Download PDF sample

Rated 4.85 of 5 – based on 15 votes